Electromagnetic prediction of multiscale depolarizationZERRAD, Myriam; SORRENTINI, Jacques; SORIANO, Gabriel et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771814.1-771814.8Conference Paper

Error analysis of 3D shearography using finite-element modellingGOTO, D. T; GROVES, R. M.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771816.1-771816.12Conference Paper

In situ control of roughness of processed surfaces by reflectometric methodFILATOV, Yuriy D; FILATOV, Olexandr Yu; HEISEL, Uwe et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181J.1-77181J.9Conference Paper

Interferometric precision with Fourier based deflelctometryBEGHUIN, D; DUBOIS, X; JOANNES, L et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180B.1-77180B.8Conference Paper

One-shot measurement of surface profile using an astigmatic microscope systemKANG, C.-S; LEE, J.-U; KIM, J. W et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180X.1-77180X.7Conference Paper

Optical coherent sensor for monitoring and measurement of engineering structuresLUKASZEWSKI, Dariusz; SALBUT, Leszek; DZIUBAN, Jan A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181G.1-77181G.7Conference Paper

Test objects for calibration of SEMs and AFMs operating at the nanoscaleGAVRILENKO, V. P; NOVIKOV, Yu. A; RAKOV, A. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180Y.1-77180Y.12Conference Paper

Accuracy of ellipsometric measurements of Si-SiO2 structuresGAVRILENKO, V. P; NOVIKOV, Yu. A; RAKOV, A. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181B.1-77181B.10Conference Paper

Comparability and uncertainty of shape measurements with white-light interferometersBOEDECKER, S; BAUER, W; KRÜGER-SEHM, R et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180J.1-77180J.12Conference Paper

Digital holography from shadowgraphic phase estimatesEILENBERGER, Falk; PLIAKIS, Dimitris; MINARDI, Stefano et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771804.1-771804.8Conference Paper

Motion detection using speckle photography and extended fractional Fourier transformBHADURI, B; TAY, C. J; QUAN, C et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771813.1-771813.8Conference Paper

Multispectral characterization of diffractive micromirror arraysBERNDT, Dirk; HEBER, Jörg; ECKERT, Mark et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180Q.1-77180Q.11Conference Paper

Object-Adapted Fringe Projection Technique on Scattered Data InterpolationZHOU, Wenjing; PENG, Junzheng; CHEN, Mingyi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180E.1-77180E.10Conference Paper

A micro-SPM head for large-scale topography measurementGAO, S; LI, Z; HERRMANN, K et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 7781L.1-77181L.9Conference Paper

Advances in the development of the LNE metrological atomic force microscopePOYET, Benoit; DUCOURTIEUX, Sébastien.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180U.1-77180U.8Conference Paper

Modelling the colour of a coated rough steel surfaceGOOSSENS, V; STIJNS, E; VAN GILS, S et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180L.1-77180L.7Conference Paper

Simple methods for alignment of line distance sensor arraysBREMER, H; SCHMÄHLING, F; ELSTER, C et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181M.1-77181M.10Conference Paper

Automated Multi-Scale Measurement System for MEMS-CharacterizationLYDA, W; BURLA, A; HAIST, T et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180G.1-77180G.11Conference Paper

Phase retrieval in ESPI from a dense phase fringe patternNIU, H; QUAN, C; TAY, C. J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771817.1-771817.9Conference Paper

Scatterometric analysis of chatter marks occurring in industrial grinding processesBÖHM, J; VERNES, A; JECH, M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181E.1-77181E.7Conference Paper

Semi-derivative real filter for the measurement of the wavefront distortionKASZTELANIC, Rafał; BARANSKI, Maciej.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181I.1-77181I.8Conference Paper

Simulation and in-plane movement characterization of 2D MEMS platformKREZEL, Jerzy; LASZCZYK, Karolina; BARGIEL, Sylwester et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180H.1-77180H.8Conference Paper

An optical microform calibration system for ball-shaped hardness indentersZHI LI; SAI GAO; HERRMANN, Konrad et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77181C.1-77181C.8Conference Paper

Fast non-contact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopyKÜHN, Jonas; SOLANAS, Eduardo; BOURQUIN, Sébastien et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 771805.1-771805.8Conference Paper

Multi-Wavelength Digital Holographic Microscopy for High Resolution Inspection of Surfaces and Imaging of Phase SpecimenKOSMEIER, Sebastian; LANGEHANENBERG, Patrik; PRZIBILLA, Sabine et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7718, issn 0277-786X, isbn 978-0-8194-8191-7, 77180T.1-77180T.7Conference Paper